Nanostructure Analysis of Sol-gel PZT Thin Films Derived from Different Chemical Routes
نویسندگان
چکیده
منابع مشابه
Processing Sol-gel Pzt Thin Films for Microactuators
Sol-gel derived lead zirconate titanate (PZT) thin films are being investigated for micromechanical applications. A synthesis technique which involves the spin coating of several thin layers followed by rapid thermal annealing to crystallize the perovskite phase and repetition to achieve thicker films is described. Methods of improving the PZT-PZT interfaces between subsequently annealed layers...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2009
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927609990729